Lub nqus plua plav valve yog cov cuab yeej tseem ceeb rau cov kev cai ua kua hauv lub tshuab nqus tsev los ntawm kev sib khi lossis tsav tswj. Nws cov tshuab ua haujlwm tuaj yeem faib ua cov qauv hauv qab no:
1. Tub ntxhais ua haujlwm ua haujlwm
Faib Faib
Txais yuav txhua tus hlau khib nyiab dynamic ntim (hloov cov pa roj av kom nthuav dav thiab cog lus thaum lub tshuab nqus dej, thiab tus nqi to tsawg dua los yog sib luag rau 1 × 10⁻¹⁰ 10⁻¹⁰ ·.
Thaum lub rooj vag raug kaw, nws tsim cov molecular haum nrog lub rooj iav-polished valve lub rooj (ra tsawg dua los yog sib npaug
Tsav tswj
Phau Ntawv Hom: Cov iav cab hlau, cov iav kis, cov iav kis, cov iav xa khoom yog tsav thiab nce los ntawm kev sib hloov tes, thiab muaj peev xwm tsawg dua los yog sib npaug rau xyoo 15Na.
Fais Hom: Stepper Tsav Tsav Tsheb, muab qhov tseeb ntawm 0.01mm, Haum rau SiciSonductor Wafer kis tau zoo.
Pneumatic Hom: Compressed Cua Tsav Lub Tog Raj Kheej Piston, lub sijhawm teb yog<1s, and it is used for emergency isolation of spacecraft vacuum chambers.
Siab tshuav
Lub cev valve yog nruab nrog KF16 kev ua pa tawm ntawm huab cua tawm chaw nres nkoj. Ua ntej qhib thiab kaw, ib lub tshuab tsim hluav taws xob ywj pheej tau siv kom sib npaug ntawm lub siab sib txawv ntawm lub zog valve thiab lub kaw lus (ΔP <10pa) txhawm rau tiv thaiv Airflow kev tab kaum.
2. Kev ua haujlwm raug ua haujlwm
| Hom | Cov txheej txheem kev ua haujlwm | Daim ntawv thov |
|---|---|---|
| Tag nrho ntawm | Lub rooj vag ua kom tiav lub rooj zaum hauv lub rooj zaum valve los ua ib qho khi ob npaug (billows + chwv ze) | Particle Accelerator Beam Tube Kev suav |
| Flow Cov Kev Cai | Lub valve phaj qhib tau tswj ntawm 10% -90%, thiab linear ntws tswj tau tiav los ntawm v-puab lub zeem muag zawv zawg | Roj Txhaj Rau Nqus Tsev Txheej Txheem |
| Kev Txiav Ceev | Actuatic Actuator muaj cov txheej txheem tshem tawm thaum muaj xwm ceev, teb lub sijhawm tsawg dua lossis sib npaug rau 0.3S | Nuclear Fusion Ntaus Kev Kub Ceev |
| Kev txij nkawm | Txuas nrog lub tshuab nqus tsev, lub valve qhib yog cia li zoo tau zoo-tuned los tuav lub tsev nqus dej℃(± 0.5pa) | Chaw Ib puag ncig Simulation Chamber |

3. Cov khoom siv thiab cov txheej txheem cov yam ntxwv
Valve Lub Cev: 316L Ultra-Tsawg Carbon Stainless Hlau Electrolytic Polishing, txo cov roj av adsorption thaj tsam los ntawm ntau dua 60%
Cov Cheebtsam Sib Txawv: Hastelloy C-276 Cov Ntsig (tiv taus 100,000 Latural Cycles) + Oxygen-dawb Tooj Sealing nplhaib (Vickers Hardness Hv80)
Cov kev kho deg: Sealing nto ion sputtering titanium plating (tuab 2μm), sib txhuam coefficient txo mus rau 0.08.
4. Kev thov cov xwm txheej sib piv
| Tshav pob | Phab Valve | Nqus tsev yuav tsum tau | Kev Xav Tau Tshwj Xeeb |
|---|---|---|---|
| Kev Tsim Txaj Semiconductor | Hluav Taws Xob Cov Tshuab Nqus Tsev Kub Siab Loj | Tsawg dua los yog sib npaug rau 1 × 10 teev | Tiv taus 150℃ci, xoom particle tso tawm |
| Caij nkoj mus kuaj | Pneumatic Ceev Kaw Valve | Tsawg dua los yog sib npaug rau 1 × 10 teev | Kev co tshuab luam (20-2000z) |
| SYNCHROTRON RADIANIANIANING | Kua-txias rooj vag valve | Tsawg dua los yog sib npaug rau 1 × 10 teev | Ua Kua Nitrogen Txias Tsho (-196 Degree) |
| Nuclear Fusion Ntaus | Hluav Taws Xob Resistant Kev Noj Qab Zib | Tsawg dua los yog sib npaug rau 1 × 10 teev | Neutron iradiation Kuj (10¹⁹ N / CM²) |

5. Kev ua haujlwm txwv tsis pub
Qhov kub thiab txias: -269℃(ua kua helium txias hom) rau 450℃(kub alloy hom)
Txoj kab uas hla: micro valve φ6mm rau cov nqus dej ntau zog valamber valve φ1200mm
Lub Neej Index: billows foob sib dhos ua ke ntau dua lossis sib npaug rau 50,000 qhib thiab kaw mus
